| Subcommittee | Subcommittee Title | Published standards | Standards under development | 
|---|---|---|---|
| ISO/TC 201/SC 1 | Terminology | 3 | 0 | 
| ISO/TC 201/SC 2 | General procedures | 9 | 0 | 
| ISO/TC 201/SC 3 | Data management and treatment | 5 | 1 | 
| ISO/TC 201/SC 4 | Depth profiling | 6 | 0 | 
| ISO/TC 201/SC 6 | Mass spectrometries | 12 | 2 | 
| ISO/TC 201/SC 7 | Electron spectroscopies | 24 | 3 | 
| ISO/TC 201/SC 8 | Glow discharge spectroscopy | 6 | 2 | 
| ISO/TC 201/SC 9 | Scanning probe microscopy | 8 | 3 | 
| ISO/TC 201/SC 10 | X-ray Reflectometry (XRR) and X-ray Fluorescence (XRF) Analysis | 1 | 3 | 
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                  | Standard and/or project under the direct responsibility of ISO/TC 201 Secretariat | Stage | ICS | 
|---|---|---|
| 
                           SCA –Surface chemical analysis of bacteria and biofilms 
                           | 
                        30.99 | 
                           | 
                      
| 
                           Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy 
                           | 
                        95.99 | |
| 
                           Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy 
                           | 
                        90.93 | |
| 
                           Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting 
                           | 
                        95.99 | |
| 
                           Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting 
                           | 
                        60.60 | |
| 
                           Surface chemical analysis — Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy 
                           | 
                        90.60 | |
| 
                           Surface chemical analysis — Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy — Amendment 1 
                           | 
                        60.60 | |
| 
                           Surface chemical analysis — Surface characterization — Measurement of the lateral resolution of a confocal fluorescence microscope 
                           | 
                        90.93 | |
| 
                           Surface chemical analysis — Use of Total Reflection X-ray Fluorescence spectroscopy in biological and environmental analysis 
                           | 
                        90.93 | |
| 
                           Surface chemical analysis — Characterization of functional glass substrates for biosensing applications 
                           | 
                        60.60 | |
| 
                           Surface chemical analysis — Measurement of lateral and axial resolutions of a Raman microscope 
                           | 
                        60.60 | |
| 
                           Surface chemical analysis — Specimen taking, storage, and transport of biological specimens 
                           | 
                        20.00 | 
                           | 
                      
| 
                           Surface chemical analysis — Determination of the minimum detectability of surface plasmon resonance device 
                           | 
                        60.60 | 
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